Micromachined silicon force sensor based on diffractive optical encoders for characterization of microinjection

We present a micrograting-based force sensor integrated with a surface micromachined silicon-nitride probe for penetration and injection into Drosophila embryos. The probe is supported by springs of a known spring constant, and the penetration force is determined from displacement measurements using a high-resolution, miniaturized optical encoder that is designed to only be sensitive to axial deflections of the probe. The optical-encoder force sensor exhibits configurable sensitivity and dynamic range, allowing monitoring over a wide range of forces. The periodicity of the encoder response can be used for calibration of the injector displacement and to obtain information about the localized elastic properties of the target. We used an force sensor with a measured spring constant of 1.85 N/m for penetration experiments on Drosophila embryos, and found a penetration force of 52.5 N (±13.2%) and a membrane displacement of 58 m (±5.2%). © 2003 Elsevier B.V. All rights reserved.